Negative/Low Pressure Semiconductor Chiller

ZLFQ-80 25℃/35℃

TEMPERATURE ACCURACY ±0.1℃

Cooling and temperature control in negative pressure environment, suitable for cooling various types of boards.

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Overall Dimensions

1300mm(L)*700mm(W)
*1850mm(H)

電源

AC220V/50HZ，
8A(max)

Communication Protocol

RS485 Serial Port MODBUS RTU Protocol / Ethernet Interface TCP/IP Protocol

Principle:

Drive the heat transfer medium (water/oil) circulation through the negative pressure generator to avoid leakage risk, suitable for cooling various types of boards.

ZLFQ SERIES

25℃/30°C

Supply and Return Liquid Temperature

80KW

Rated Heat Exchange Capacity

±0.1°C

温度制御精度

モデル	ZLFQ-80
Rated Heat Exchange 定員		80KW
Primary Side (Medium Side)	Working Medium	Pure water, fluorinated liquid, ethylene glycol aqueous solution, etc.
	Rated Flow Rate	300L/MIN
	Liquid Storage Volume	120L
	Supply and Return Liquid Temperature	25/35℃
	温度制御精度	±0.1℃
	Vacuum Pump Air Extraction Capacity	130m3/h
	Negative Pressure Head	70KPA
	Internal Circulation Pump Configuration	1+1 Redundancy
	インターフェースサイズ	ZG1-1/4
Secondary Side (Cooling Side)	Cooling Medium	PCW
	Cooling Flow Rate	4m3/h
	Filtration Accuracy	50um
	インターフェースサイズ	ゼットジーワン
制御システム		PLC Controller, Feedforward Control + Lag-Compensated PID Algorithm
Liquid Supply Leakage Rate		Negative Pressure Circulating Leak-free System
安全保護		Equipped with self-diagnosis function, equipment overload protection, low liquid level protection, etc.
Other Functions		Functions including automatic leak detection, automatic liquid discharge, automatic liquid replenishment, etc.

CORE TECHNOLOGY & ADVANTAES

Precise temperature control through fluid circulation under negative pressure environment

Leak-proof design

When the system is running, the pipeline is in a negative pressure state, and even if the pipeline is broken, it will not leak high-temperature medium, which is highly safe.

High efficiency and energy saving

Fully enclosed circulation, closed circulation, reduce heat energy loss.

Precise temperature control

PID algorithm or PLC control is adopted to achieve temperature fluctuation ≤±0.3℃, which is suitable for precision manufacturing scenarios.

Multi-scenario adaptation

Supports pure water, fluorinated liquid, diethanolamine aqueous solution and other different media, the temperature control range is from room temperature to 80℃

ALL Semiconductor chillers model

FLTZ 5℃~90℃
Process Chillers

Cooling capacity 6kW~40kW
Cooling water flow 1.5m³/h~9m³/h
Temp accuracy ±0.05℃

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FLTZ -25℃～90℃
Thermal Chillers

Cooling capacity 2kW~15kW
Cooling water flow 1.2m³/h~10.2m³/h
Temp accuracy ±0.05℃

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FLTZ -45℃～90℃
低温チラー

Cooling capacity 1kW~8kW
Cooling water flow 1.5m³/h~8m³/h
Temp accuracy ±0.05℃

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FLTZ -80℃～+90℃
Recirculating Water Chillers

Cooling capacity 0.6kW~3kW
Cooling water flow 1.8m³/h~6m³/h
Temp accuracy ±0.05℃

さらに詳しく

FLTZ -100℃～+90℃
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Cooling capacity 1.5kW~3kW
Cooling water flow 50L/min~100L/min 2bar~7bar
Temp accuracy ±0.05℃

Leran more

なぜ選ぶのか LNEYA?

Semiconductor Chillers Manufacturer in China

❯More than 15 years of design and production experience
❯One-stop service
❯Short delivery time
❯Strong after-sales service and technical support
❯Highly accurate and repeatable temperature control
❯Made in Wuxi, China
❯130+ patents

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