
AI Series Circulating Air Refrigeration Unit
アプリケーション
Applied to high and low temperature testing of semiconductor equipment. Electronic equipment high and low temperature constant temperature test cold and heat source; independent refrigeration cycle fan unit; can work continuously for a long time, automatic defrosting, and the defrosting process does not affect the storage temperature.
製品の特徴
製品パラメーター
AI -105℃~+125℃
モデル | AI-6535 AI-6535W |
AI-8035W | AI-1055W | |
温度範囲 | -65℃~+125℃ | -80℃~+125℃ | -105℃~+125℃ | |
制御モード | PIDアダプティブコントローラ | |||
通信プロトコル | MODBUS RTUプロトコル、RS 485インターフェース | |||
温度フィードバック | ピーティーヒャク | |||
操作パネル | 7-inch touch screen, show temp. curve/ EXCEL date output | |||
温度精度 | ±0.05℃(Steady state outlet temperature) | |||
暖房能力 | 3.5KW | 3.5kW | 3.5kW | |
冷却 容量 |
125℃ | 3.5KW | 3.5kW | 3.5kW |
50℃ | 3.5kW | 3.5kW | 3.5kW | |
20℃ | 3.5kW | 3.5kw | 3.5kw | |
0℃ | 3.5kW | 3.5kw | 3.5kw | |
-20℃ | 3kW | 3.5kW | 3.5kW | |
-40℃ | 2.1KW | 2.5kW | 3.5kW | |
-60℃ | 1KW | 2.1kw | 3kw | |
-75℃ | 1kw | 2kw | ||
-95 | 1KW | |||
Circulating air flow | 550m³/h | |||
Inlet and outletair intertace | DN125 | |||
コンプレッサー | Emerson Copeland scroll flexible compressor | |||
安全保護 | Self-diagnosis function; Phase sequence protection. freezer overload protection; high pressure switch. overload relay. thermal protection device. |
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Defrosting device | There are installed defrosting device and condensate drain inside | |||
Continuous running | Running continuously | |||
Timing operation | Can set timed start and stop time | |||
冷媒 | R404A R23 | R404A R508B | R404A R23 R14 | |
Water-cooled | 1200L/H 1.5bar~4bar | 1600L/H 1.5bar~4bar | 2600L/H 1.5bar~4bar | |
寸法cm | 55*100*175 | 55*100*175 | 70*100*175 | |
重量 | 280kg | 300kg | 360キロ | |
シェル素材 | Cold rolled sheet spray coating REL 7035 |
1. Widely used in high and low temperature testing of semiconductor equipment.Cold and heat source of electronic equipment at high temperature and low temperature;
2. Independent refrigeration circulating air units;
3. Can work continuously for a long time, automatic defrosting, defrosting process does not affect the storage temperature;
4. Modular design, easy replacement of spare machine (if there are 10 machines, as long as a standby unit can);
5. Solve frequent open and close doors, evaporating system frosting problems;Evaporation system defrosting process does not affect.
6. Construct a set of high and low temperature and constant greenhouse (according to the drawings provided, the box can be joined together like building blocks to connect the electricity and water and set the temperature to work)
Product Advantages
- 効率的な生産の安定性と再現性の結果;
- プレート式熱交換器とパイプラインヒーターを使用して、冷却と加熱の速度を向上させる;
- 温度範囲が非常に広く、液体媒体を交換する必要がない;
- 熱伝導性液体の寿命を延ばす完全密閉システム;
- 磁気駆動ポンプを採用し、軸封漏れの問題がない;
- 高温冷却技術は、直接300℃で冷却するためにコンプレッサーを起動します。
可変周波数ポンプは、循環油圧圧力と流量を調整することができます。


client output signal
Communication function
アプリケーション
Such as chillers that control the processing temperature on the Fab equipments.
Cooling of CMOS/CCD sensors in semiconductor metrology systems.
Recirculating Chiller for semiconductor metering AOI system.
シングルチャンネル空冷式クーラーで、主にエッチングマシン用に設計されています。チャンバー側壁の独立した温度制御に使用されます。
Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.
LNEYA provides customized Chiller services
custom chiller sizes
Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements. No matter how many tons of chiller you need, we can create the best solution.
custom chiller types
We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers. Regardless of the type of refrigeration compressor, we can design it according to your requirements.
custom temperature ranges
We can create a custom solution for temperatures from -150℃ to +350℃. Custom temperature ranges for specific industries.
custom chiller voltage
Customize chiller voltage and phase according to your needs. Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.
LNEYA工場訪問
温度制御サプライヤーとしてneyaを選ぶ理由
経験年数
顧客満足度
m² 生産面積
特許技術